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Green Etching Techniques for MEMS Applications: Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems

Kaiying Wang
Dec 18, 2025
$147.95
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Overview

Appropriate for
Language
English
No. of Pages
134
Publisher: CRC Press
Shipping dimensions: 9" H x 6" W x 1" L
ISBN: 9781041144960
Life stage: null

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