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Rare-Earth Implanted MOS Devices for Silicon Photonics: Microstructural, Electrical and Optoelectronic Properties/en-ca/rare-earth-implanted-mos-devices-for-silicon-photonics-microstructural-electrical-and-optoelectronic-properties/9A429083-ACCD-4E16-8CE3-C3EA5BA6DD80.html9A429083-ACCD-4E16-8CE3-C3EA5BA6DD80
Rare-Earth Implanted MOS Devices for Silicon Photonics: Microstructural, Electrical and Optoelectronic Properties